PRODUCTS CENTER

Wafer micro inspection system

Grenada Wafer micro inspection system

Microscopic defect detection for Wafer, can be used with different feeding systems, can be used with 20X lens to detect 1um defects; optional EFEM, OCR/Pre-Aligner; Wafer semi-finished/finished OQC; SiC / GaN / GaAs / Si / sapphire; Compatible with VCSEL / MEMs / Mini LED / Micro LED; Microscopic objective lens (Nikon 5X~50X) is also available.

Desktop Conveyor

Grenada Desktop Conveyor

Self-made miniaturized design, mainly integrated into industrial microscopes and AOI systems, and other applications that need to be transported from wafer cassettes, 4/8 inch and 6/8 inch are optional; Pre-Aligner is included/OCR is optional.

Sorting / Transfer Equipment

Grenada Sorting / Transfer Equipment

Manipulators are used to operate wafers, and various standard wafer cassettes and sizes (6/8 inches and 8/12 inches) can be selected; OCR/Pre-Aligner is optional.

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